Scan Electron Microscope Dispersive X Analysis
Using SEM (scan electron microscope) analysis, the morphology of both conductive and non-conductive materials can be detected when using different detectors SE and BSE, respectively. For EDX analysis, it is possible to check and quantify most elements, except for H, Li and He. There are three types of scanning modes: line analysis, spot analysis and selected area analysis.
Main Application/Advantages
- With SEM-EDX it is possible to obtain surface morphology, contamination and component, as well as grain size, nodule and cavity, and coating thickness. In particular, a mapping function can be used to identify the distribution of different phases.
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Specification
| Items | Description |
| Cooling System | Liquid Nitrogen |
| Detector | SE, BSE, ESED |
| Magnification | 30,000 X |
| Resolution | 3.0 ~ 4.5nm |


